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Supply and Commissioning of an Inductively Coupled Plasma Etcher

University of Strathclyde

Buyer Contact Info

Buyer Name: University of Strathclyde

Buyer Address: Learning & Teaching Building, 49 Richmond Street, Glasgow, UKM82, G1 1XU

Contact Name: FAJINMI Ejiro

Contact Email: ejiro.fajinmi@strath.ac.uk

Contact Telephone: +44 7811592949

Status
complete
Procedure
open
Value
375883.47 GBP
Published
08 Jan 2026, 00:00
Deadline
n/a
Contract Start
n/a
Contract End
n/a
Category
goods
CPV
31712100
Region
n/a
Awarded To
SENTECH Instruments GmbH
Official Source
Open Public Contracts Scotland

Description

This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

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Opportunity Context

More Information Links

External Link: https://www.publiccontractsscotland.gov.uk/search/show/search_view.aspx?ID=JAN546727

Link Title: Supply and Commissioning of an Inductively Coupled Plasma Etcher

Link Description: This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

Lots

Lot Description: The Institute of Photonics is seeking to complement their cleanroom micro-fabrication facility equipment with an Inductively Coupled Plasma Etcher system The Technical Team envision that the equipment will process semiconductor materials that will include but not be limited to: 1 Gallium Nitride (GaN) light-emitting diodes 2 Silicon (Si) passive and active devices The equipment will be used to advance scientific investigation in neuro-technology and operated by PhD students, Postdoctoral Research Associates and Technicians within the Institute of Photonics. The Contracting Authority anticipates that the contract will be for a duration of twenty (24) months. The Contracting Authority requires a supplier that can fulfil the below non-exhaustive list of requirements: 1 Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) mode of operation to plasma etch hard materials such as GaN at etch rate of >500nm/min 2 Deep Silicon Etching (DSE) mode of operation to plasma etch high aspect ratio and high-density structures in Silicon at etch rate of >1000nm/min 3 These two modes of operation co-existing within the same equipment within a minimal footprint 4 Low-maintenance, especially with the provision of servicing-free high vacuum pumping systems (magnetic-levitated turbo molecular pump) Please refer to the full technical and tender information available in the Public Contracts Scotland-Tender.

Lot 1 Status: complete

Lot 1 Has Options: Yes

Lot 1 Options: The Contracting Authority reserves the right to request additional deliveries by the successful Tenderer, either intended as partial replacement of supplies or installations or as extensions of existing supplies and installations. The Contracting Authority may at it's sole discretion exercise this option.

Lot 1 Award Criterion (quality): Quality

Documents

Document Title: Supply and Commissioning of an Inductively Coupled Plasma Etcher

Document Description: This Notice relates to an open tender above the Agreement on Government Procurement (GPA) threshold for goods related to research and development equipment required by the University of Strathclyde's (Contracting Authority) Institute of Photonics department. The Contracting Authority envisions a single supplier shall undertake the contract for the supply, delivery, installation and commissioning of an Inductively Coupled Plasma Etcher system at a University of Strathclyde Lab facility, located in the Technology and Innovation Centre (TIC) specified cleanroom. The equipment is grant funded by the Wolfson Foundation to advance scientific investigation in neuro-technology.

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